I'm curious to know how the voltage was applied to all the parts. I guess the repeller will be positively charged, and the lens are alternating and probably with RF to help focusing? But what about the ion source body? Is it grounded?
Also curious,…
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Hi fgunawan , thanks for your reply. I did try with 100% IPA, but I didn't run the pressure test and leak test. I am new with the software and learning independently. I will try to explore these options.
Hi Linds,
Linds
Welcome to the Community. I think this is an excellent question, and something we all face from time to time. Thanks for asking!
I'm going to assume that you have a split/splitless inlet. A PM for this inlet usually includes a liner…
Hello what9000 ,
I have a couple questions to try to understand this better:
- What is the outlet voltage?
- Is it a dedicated circuit?
- Are you using any UPS systems, or is the system plugged into the wall directly?
You should be able to but best to get customer care in your region to confirm they can advise on both options. The MS40 upgrade is the better option if you can go for it.
It depends on what you have installed. There is an upgrade kit. The old-style chambers are no longer available. You may want to contact your local service group.
Also, if too costly maybe upgrade to a newer degasser.
5067-5387 vacuum chamber replacement…
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