7900 extinguishes plasma during Auto RF matching

Hello everyone,

7900 extinguishes plasma when trying to perform Auto RF matching in any mode. Error code: Plasma was shutoff during Analysis (Vacuum), Warning code 2150: Interface Vacuum is too low.
Plasma ignition is well. Orifices are in good condition. All gas connections are tight. Torch position as usual. IF/bk pressure - no issues. RF matching value = 2.0 (in range). Reflected power after ignition and transition to the Analysis mode is 50 - 110 W, Front power 1550 W

What could be the cause of the problem? What additional parameters should I check?

Parents Reply Children
  • Hi,

    You can manually change the RF matching in tune.  Be very careful when doing the change.  Do it with very small increment 0.1 and wait for the RF power meter to lower or increase.  You want the RF power meter to be lower than 25 W in analysis.  Also, save all your batch with the optimal found value.  So, it does not trigger.  You can also update the user tune and send value to icpms to be sure the value is change.  If nothing works.  Then no choice to change the Matching box or the sensor.   At last check all your contact with shield plate, torch box and torch box cover.  They need no ground spot.

Was this helpful?