Agilent 6546 insufficient vacuum

Hi. My Agilent 6546 qTOF and a nitrogen generator recently suffered from a power outage and surge. The nitrogen generator is now fixed, but the qTOF shows 'insufficient high vacuum [#69:2:5]' error. The Turbo1 is stuck at ~ 2E-4 for several days. Would you suggest what I should do? Thanks. 

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