I have issue with Agilent 6460 that the turbo pump 1 speed is fluctuating between 1% to 38 %
The vacuum of the rough pump is good 1.6 E+o Torr
The green LED at the turbo 1 power supply isn’t turning on .
I measured the input for the power turbo 1 supply and it is 230 volt AC also i measured the output looks 48 volt DC
i checked The Turbo pump 1 visually and it looks spinning
I replaced the power supply for turbo pump 1 and still not getting green light and still having same issue.