7900 extinguishes plasma during Auto RF matching

Question

Hello everyone, 
 7900 extinguishes plasma when trying to perform Auto RF matching in any mode. Error code: Plasma was shutoff during Analysis (Vacuum), Warning code 2150: Interface Vacuum is too low. Plasma ignition is well. Orifices are in good condition. All gas connections are tight. Torch position as usual. IF/bk pressure - no issues. RF matching value = 2.0 (in range). Reflected power after ignition and transition to the Analysis mode is 50 - 110 W, Front power 1550 W What could be the cause of the problem? What additional parameters should I check?

cschulz · Accepted Answer

Hi, 
 sounds like a Problem with the Matching Box. 
 More precisely, with the zero position of shunt C. A sensor is responsible for this, and sometimes this is defective or dirty. To change or clean it, the entire matching box has to be removed, which is a job for an Agilent technician.

cschulz · Answer

Hi Mag, 
 I would check the geometry of the work coil. There is a small tool (white or orange) and a manual how to use it, within the tool set of the instrument. 
 Then i would clean the bottom of the torch box with the blue sandpaper. 
 
 Cheers 
 Chris

7900 extinguishes plasma during Auto RF matching

Top Replies