we have a deposition system which operates at 100 mbar with a rotary pump.
inside this system we flow argon, but when we open the chamber we also expose it to air and so nitrogen enters. we are not bothered by oxygen, water vapor and carbon.
My question is: with our turbo pump and with our base pressure, should we expect to remove nitrogen and argon with the same efficiency? should we expect to have traces of nitrogen even if we purge the chamber several times with argon and we leave the chamber in argon flow some days?
would it be different if instead of argon we use Helium as main gas?
thanks a lot!