5977B - Autotune cannot be performed after PM service

Error: Tune action stopped: The valid range for Ent Lens Offset is 0.00 to 66.50, Step 0.0081

This error message could be caused by having the entrance lens and ion focus wires crossed.  Did you change the column or do anything else since the PM was completed?  I would suggest venting and verifying all of the connections.  You could also try doing a ATUNE rather than an ETUNE to see if it will complete that style of tuning that does not use the extractor lens and ion body voltages.

The pre-PM tune is quite ugly with 347.7% Nitrogen. The ion source will not function well with that much nitrogen in there.